Advanced Automation & Metrology for Semiconductor Manufacturing

We design and build production-ready automation and metrology equipment with deep specialization in 200 mm fabs and a focus on integrating Automated Material Handling Systems (AMHS) for the commercial scaling of next generation materials like high-yield Silicon Carbide (SiC) and Gallium Nitride (GaN) manufacturing — and selective deployment in 300 mm production environments.

200 mm & Select 300 mm Manufacturing Solutions

Automation Platform Development
Advanced Metrology Systems
Fab-Ready Tool Integration

SATS designs and delivers production-ready automation and metrology equipment for semiconductor manufacturing environments. Our primary focus is supporting 200 mm fabs with modernized tools emphasis on scaling Silicon Carbide (SiC) and Gallium Nitride (GaN) manufacturing, SATS enables higher yields and lower costs for critical power and industrial applications — while extending these proven capabilities into the future of Silicon Photonics and other Quantum device manufacturing.

In addition, we selectively develop and deploy targeted automation and metrology solutions for 300 mm production environments when customers require specialized capabilities beyond standard OEM platforms. All SATS systems are designed for integration into active fabs without disrupting production.

Wide-bandgap semiconductors such as Silicon Carbide (SiC) and Gallium Nitride (GaN) are reshaping power electronics, energy systems, and advanced industrial applications. Scaling these materials in 200 mm manufacturing environments introduces unique challenges in defectivity, wafer handling, process control, and yield optimization.

SATS develops advanced automation and metrology systems purpose-built to address these challenges, enabling reliable, high-volume production while reducing cost per wafer. Our platforms are designed for integration into existing fab infrastructures and evolving process flows.

SiC & GaN Automation and Metrology Expertise

About SATS

Semiconductor Automation Technology Services, LLC (SATS) was founded in response to direct customer demand for new, state-of-the-art manufacturing equipment—built by engineers with decades of real-world fab experience.

SATS is a wholly owned subsidiary of Van Der Geest Enterprises, Inc. (VDGE), leveraging VDGE’s long-standing leadership in semiconductor manufacturing support and integration. While VDGE focuses on services and lifecycle support, SATS is dedicated to designing and building next-generation automation and metrology tools for modern semiconductor manufacturing and emerging Silicon Photonics and other Quantum Device manufacturing environments.